Elemental Analysis of Semiconductors: Identification and quantification of element distributions in semiconductor nanostructures

In today’s episode, we are joined by Dr. Meiken Falke, Global Product Manager EDS/TEM, and Hosanna Lillydahl-Schroeder, Senior Applications Scientist, to discuss the use of TEM for semiconductor analysis. 

 Webinars:

TEM, STEM and T-SEM EDS Quantification at its Best -https://www.bruker.com/en/news-and-events/webinars/2019/tem-stem-and-t-sem-eds-quantification-at-its-best.html

Nanostructural Characterization of Semiconductors with SEM https://www.bruker.com/en/news-and-events/webinars/2020/nanostructural-characterization-of-semiconductors-with-sem.html 

New Windowless EDS detector - Link to intro of Oval 100mm2 for TEM: https://www.bruker.com/en/news-and-events/webinars/2020/new-windowless-EDS-detector-100-oval.html

Abstracts and Whitepapers: 

Paper recommended in session: Coherent Bremsstrahlung effect observed during STEM analysis of dopant distribution in silicon devices using large area silicon drift EDX detectors and high brightness electron source

R.Pantel, Ultramicroscopy, Volume 111, Issue 11, November 2011, Pages 1607-1618

https://www.sciencedirect.com/science/article/abs/pii/S0304399111002117

Website:

https://www.bruker.com/en/products-and-solutions/elemental-analyzers/eds-wds-ebsd-SEM-Micro-XRF.html

Contact Us:

 [email protected] 

+1 800-234-XRAY(9729)