Green CVD: How Sustainable is Thin Film Deposition?

ALD stories podcast

English - October 28, 2021 18:00 - 39 minutes - 36.3 MB
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Professors Henrik Pedersen, Sean Barry, and Jonas Sundqvist join Tyler to discuss their recent publication in JVSTA about Green CVD. The trio talk about the conception of a new research field which concerns creating more sustainable thin film deposition practices without sacrificing film quality and offers some perspective on a number of areas and strategies addressed in the manuscript.

Read the paper here: https://avs.scitation.org/doi/10.1116/6.0001125