ALD Precursor Design for Hard to Deposit Metals - ALD Stories Ep. 6
ALD stories podcast
English - September 30, 2021 09:17 - 27 minutes - 19.1 MBTechnology Science Chemistry aldep ald atomiclayerdeposition materialscience thinfilm Homepage Download Apple Podcasts Google Podcasts Overcast Castro Pocket Casts RSS feed
Previous Episode: Meet Dr. Katja Väyrynen
Next Episode: Green CVD: How Sustainable is Thin Film Deposition?
Tyler sits down with Wayne State University’s Chuck Winter to talk about his approach to designing precursors for ALD. Chuck explains what makes a good ALD precursor and how elegant organic chemistry can enable ALD processes for hard-to-deposit metals, like cobalt and aluminum. Learn more about Chuck’s research here: http://www.clas.wayne.edu/wintergroup/
Papers mentioned in this episode:
https://doi.org/10.1021/acs.chemmater.7b02456 - Co metal ALD
https://doi.org/10.1021/acs.chemmater.8b00445 - Al metal ALD